Open Access
表1
MEMS弹簧结构尺寸
| 线宽b/ mm | 厚度h/ mm | 总长L/ mm | 总宽d/ mm | 夹角θ/ (°) | a/ mm | R/ mm | c/ mm |
| 0.2 | 0.5 | 7.34 | 7 | 10 | 0.2 | 0.27 | 0.7 |
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