Study on sinusoidal estimation deviation of electrostatic actuated MEMS mirror torsion angleJingang LI, Ye HE, Shijun YUAN, Dayong QIAO, Deshui YU and Zhiyuan LIJNWPU, 41 2 (2023) 338-343DOI: https://doi.org/10.1051/jnwpu/20234120338
