Failure analysis and optimization of silicon-based MEMS setback safety deviceMo YANG, Weirong NIE, Yue ZHANG, He WANG, Baolin CHENG, Zhuoxiang NING, Yun CAO, Zhanwen XI and Jiong WANGJNWPU, 44 2 (2026) 288-296DOI: https://doi.org/10.1051/jnwpu/20264420288
