Xibei Gongye Daxue Xuebao/Journal of Northwestern Polytechnical University

Study on sinusoidal estimation deviation of electrostatic actuated MEMS mirror torsion angle

Jingang LI, Ye HE, Shijun YUAN, Dayong QIAO, Deshui YU and Zhiyuan LI

JNWPU, 41 2 (2023) 338-343

Published online: 07 June 2023

DOI: 10.1051/jnwpu/20234120338

Jingang LI

Ye HE

Shijun YUAN

Dayong QIAO

Deshui YU

Zhiyuan LI

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