Xibei Gongye Daxue Xuebao/Journal of Northwestern Polytechnical University

Analysis of factors affecting temperature uniformity of high-temperature electrostatic chucks in CVD equipment

Yankai DING, Shike ZHAO, Bo QU and Shuai WANG

JNWPU, 44 2 (2026) 426-434

Published online: 12 June 2026

DOI: 10.1051/jnwpu/20264420426

Yankai DING

Shike ZHAO

Bo QU

Shuai WANG

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)