Open Access
表1
离子饱和束流的计算和实验评估
| 输入功率/ W |
计算值 | 实验值 | 饱和离子束流误差 | |||||
| 离子束流饱和时的气 体流量/(ml·min-1) |
饱和离子 束流/mA |
离子束流饱和时的气 体流量/(ml·min-1) |
饱和离子 束流/mA |
绝对误差/mA | 相对误差/% | |||
| 4 | 2.6 | 8.3 | 2.6 | 7.4 | 0.9 | 12.2 | ||
| 6 | 2.6 | 12.4 | 2.2 | 10.1 | 2.3 | 22.8 | ||
| 8 | 2 | 16.2 | 2 | 12.5 | 3.7 | 29.6 | ||
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