Open Access
表3
静态驱动电压下悬臂梁结构端部的位移响应
| 驱动电压/ V | 实验结果/ μm | 三明治耦合有限元模型/μm | 均质化耦合有限元模型/μm |
| 50 | 19.0 | 19.6 | 20.6 |
| 100 | 37.8 | 39.3 | 41.3 |
| 150 | 57.4 | 59.2 | 62.0 |
| 200 | 76.7 | 78.8 | 82.5 |
| 250 | 95.8 | 98.6 | 103.0 |
| 300 | 116.6 | 118.1 | 123.6 |
| 350 | 136.4 | 137.9 | 144.3 |
| 400 | 157.4 | 159.0 | 164.7 |
| 450 | 177.2 | 178.9 | 185.5 |
| 500 | 196.9 | 198.7 | 206.3 |
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