Failure analysis and evaluation of MEMS springs under shock loading

冲击载荷下MEMS弹簧的失效分析与评估

School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China

Received: 12 June 2025

Abstract

In view of the application requirements of MEMS springs for fuzes in high overload environments, the failure analysis and evaluation of MEMS springs under shock loads were carried out. Based on the Johnson-Cook intrinsic model, a dynamic simulation model of MEMS springs considering plastic deformation was established, and the pulse-width vs amplitude failure critical curves of the spring mass-block system under impact loads were obtained, and the load region was divided into safe load and failure load zones. Using the Mahit hammer impact system, impact failure tests were carried out on five MEMS spring prototypes with different line widths to obtain the failure characteristics of MEMS springs under different loads, and the test results basically coincided with the simulation results. Based on the logistic regression method, a logistic regression model of the failure characteristics of MEMS springs was established, and the model was evaluated and analyzed by ten-fold cross-validation, and the accuracy of the model reached 0.9, which indicates that the model can well analyze the failure characteristics of MEMS springs, and it provide a reference basis for the failure analysis and evaluation of MEMS springs under different impact environments.

摘要

针对引信用MEMS弹簧高过载环境应用需求, 开展了冲击载荷下MEMS弹簧的失效分析与评估。基于Johnson-Cook本构模型, 建立了考虑塑性形变的MEMS弹簧动力学仿真模型, 获得了弹簧质量块系统的冲击载荷脉宽-幅值失效临界曲线, 将载荷区域划分为安全载荷与失效载荷区。利用马希特锤冲击系统, 对5种不同线宽的MEMS弹簧样机进行了冲击失效测试, 得到不同载荷下MEMS弹簧的失效特性, 测试结果与仿真结果基本吻合。基于逻辑回归方法, 建立了MEMS弹簧失效特性的逻辑回归模型, 采用十折交叉验证对该模型进行了评估与分析, 该模型的准确率达到0.9, 表明该模型能够良好地分析MEMS弹簧的失效特性, 为不同冲击环境下MEMS弹簧的失效分析与评估提供参考依据。