Open Access
表2
SMA驱动系统特性仿真微流道样本
| 编号 | 流道宽度 w/μm |
流道深度 h/μm |
流道间隔 g/μm |
流道长度 l/mm |
顶膜厚度 th/mm |
| 1 | 500 | 100 | 200 | 390 | 3 |
| 2 | 500 | 100 | 200 | 630 | 3 |
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