Open Access
表1
沉积工艺参数
| 工艺条件 | 参数大小 |
| 脉冲偏压/V | 100 |
| 直流偏压/V | 30 |
| 占空比/% | 40 |
| 频率/kHz | 40 |
| 氩气分压/Pa | 0.6 |
| 沉积时间/min | 10 |
| 弧电流/A | 80 |
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.