Failure analysis and optimization of silicon-based MEMS setback safety device

硅基MEMS后坐保险装置失效分析与优化

¹ School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
² Product Development Center, China Aviation Development Nanjing Aviation Power Co., Ltd., Nanjing 211111, China

Received: 4 July 2025

Abstract

To enhance the load identification capability and overload resistance of the silicon-based MEMS setback safety device, a silicon-based MEMS setback arming device research is carried out based on the parallel-axis ammunition fuze. Firstly, based on the spring-mass block system theory, the displacement response of the setback safety device was analyzed. A Machette Hammer platform and a visualization test platform were established. Three typical direction impacts were tested on the setback safety device prototype to determine the lack of overload resistance. An improved setback safety device is proposed by introducing a fixed anchor point to constrain the lateral displacement of the mass. A comparative analysis of displacement response and stress distribution in the tooth mechanism between the original and improved devices was conducted by finite element simulation. The results demonstrate that the fixed anchor point configuration effectively enhances device performance. Finally, the enhanced prototype was fabricated using the deep reactive ion etching (DRIE) process, followed by testing for validation. Test results demonstrate significantly enhanced overload resistance in the modified device: Withstood multiple high-intensity shocks along the setback direction before function failure, while exhibiting no significant damage under lateral and reverse setback direction impacts. The results of this paper can provide a reference for the failure analysis and optimization of similar silicon-based MEMS setback safety devices.

摘要

为提升硅基MEMS后坐保险装置的载荷识别能力与抗过载性能, 基于平行弹轴弹药引信安解装置, 开展硅基MEMS后坐保险装置研究。基于弹簧-质量块系统理论分析了后坐保险装置位移响应, 搭建了马希特锤击与可视化试验平台。针对某后坐保险装置样机开展3个典型方向的冲击试验, 揭示了其抗过载能力不足的问题。据此, 提出一种改进型后坐保险装置, 通过引入固定锚点来约束质量块横向位移。基于有限元仿真, 对比分析了改进前后装置的位移响应及齿形机构应力分布, 结果表明锚点结构有效提升了装置性能。采用深反应离子刻蚀工艺制备改进样机, 并进行冲击试验验证。试验结果表明, 改进装置的抗过载能力显著增强: 在后坐力方向可承受多次高幅值冲击才发生功能失效, 而在横向及反后坐方向冲击下, 装置未出现明显损伤。研究结果可为同类硅基MEMS后坐保险装置的失效分析和优化提供参考。