Open Access

表1

加热盘主要电参数

涂层电导率/(Ω·m) 碳化硅恒压热容/(J·kg-1·K-1) 碳化硅密度/(kg·m-3) 碳化硅导热系数/(W·m-1·K-1)
6.25×10-4 400 3 120 120

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