Open Access
表5
垂直结构静电卡盘加热丝倾斜仿真结果对比表
| 加热丝状态 | 温差/℃ | 平均温度/℃ |
| 前倾1 mm | 13.06 | 598.49 |
| 未倾斜 | 13.36 | 598.74 |
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.